发明名称 |
Method for testing a semiconductor wafer and apparatus thereof |
摘要 |
Reliability of results of a test such as a wafer burn-in test is raised. The present invention is a method for testing a plurality of semiconductor devices in a semiconductor wafer held in a cartridge. Each of the semiconductor devices has electrodes and the cartridge has a lower cartridge portion provided with a chuck holding the semiconductor wafer thereon, and an upper cartridge portion provided with a probe assembly having probes capable of contacting said electrodes. After constituting the cartridge and before placing the cartridge in the thermostatic chamber, a contact check to determine whether or not electrical contact between the electrodes of the semiconductor devices in the cartridge and the probes of the probe assembly is appropriate is performed.
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申请公布号 |
US7719300(B2) |
申请公布日期 |
2010.05.18 |
申请号 |
US20080044241 |
申请日期 |
2008.03.07 |
申请人 |
KABUSHIKI KAISHA NIHON MICRONICS |
发明人 |
WASHIO KENICHI;YASUTA KATSUO;SUGIYAMA UMENORI |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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