发明名称 Outer surface-inspecting method and outer surface-inspecting apparatus
摘要 A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels, whether the defect of the defective portion (27) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections (28a, 28b, 28c) on which the defective portion (27) is located.
申请公布号 US7718912(B2) 申请公布日期 2010.05.18
申请号 US20050302148 申请日期 2005.12.14
申请人 KABUSHIKI KAISHA TOPCON 发明人 AKIMOTO SHIGEYUKI
分类号 B07C5/00 主分类号 B07C5/00
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