APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

PURPOSE: A transfer device is provided to increase the durability and to reduce noise by preventing particles during a transferring process. CONSTITUTION: A transfer device comprises a profile(110), a car assembly(200) and maglev up/down guide unit(220/230). The profile forms the vertical shaft line. The car assembly prepares to be near to profile and the car assembly supports the blood feeding work. The car assembly is relatively carried according to the vertical shaft line of profile about profile up/down. The maglev up/down guide unit is located in the profile and or car assembly.