METHOD FOR REDUCING ROUGHNESS OF A THICK INSULATING LAYER,申请号KR20087001701-传众专利搜索

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发明名称	METHOD FOR REDUCING ROUGHNESS OF A THICK INSULATING LAYER
摘要
申请公布号	KR100958467(B1)	申请公布日期	2010.05.17
申请号	KR20087001701	申请日期	2006.07.12
申请人		发明人
分类号	H01L21/20;H01L21/3105	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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