| 摘要 |
The present invention relates to a flex circuit having one or more active electrodes, comprising:
a substrate (105) having one or more electrodes (120) made of a first material;
a first mask (200) over the conductive trace, the first mask having a first opening (220) over a portion of the electrode;
a second material (300) over a portion of the conductive trace and over a portion of the first mask (200); and
a second mask (400) over the second material, the second mask having a second opening (405) over a portion of the second material (300), the second opening (405) being offset from the first opening (220); and
a membrane (500) in the opening (405) of the second material. |
