| 发明名称 |
VERFAHREN ZUM MATERIALABTRAG AN FESTKÖRPERN UND DESSEN VERWENDUNG |
| 摘要 |
<p>The invention relates to a method for material removal on solid bodies, in particular for microstructuring and cutting, by means of liquid jet-guided laser etching, the removed material just as the non-reacted etching components being recycled to a high degree. In this way, silicon with high purity can be recovered either in a polycrystalline manner or be deposited epitaxially on other substrates in the same process chain.</p> |
| 申请公布号 |
AT465843(T) |
申请公布日期 |
2010.05.15 |
| 申请号 |
AT20070703032T |
申请日期 |
2007.01.25 |
| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;JOHANN WOLFGANG GOETHE-UNIVERSITAET FRANKFURT AM MAIN |
发明人 |
MAYER, KUNO;KRAY, DANIEL;KOLBESEN, BERND;HOPMAN, SYBILLE |
| 分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
| 代理机构 |
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