CVD-REAKTOR MIT RF-GEHEIZTER PROZESSKAMMER,申请号AT20050815830T-传众专利搜索

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发明名称	CVD-REAKTOR MIT RF-GEHEIZTER PROZESSKAMMER
摘要
申请公布号	AT465286(T)	申请公布日期	2010.05.15
申请号	AT20050815830T	申请日期	2005.12.12
申请人	AIXTRON AG	发明人	KAEPPELER, JOHANNES;WISCHMEYER, FRANK
分类号	C30B25/10;C23C16/46	主分类号	C30B25/10
代理机构		代理人
主权项
地址

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