METHOD FOR MANUFACTURING MICRO STRUCTURE USING X-RAY EXPOSURE

摘要

The present invention comprises: a photoresist exposure step of exposing a photoresist by a lateral exposure technique by installing an X-ray mask and irradiating an X-ray; a photoresist etching step of etching the exposed photoresist; a mold formation step of fabricating a mold having a micro pattern by filling a metal into the etched photoresist; a mold module formation step of combining a plurality of molds; and a micro structure formation step of forming a micro structure.