SEGMENTED FILM DEPOSITION

摘要

A segmented film deposition device includes a generally parallel arrangement of thin, elongated elements (12) disposed over a substrate (1 1, 122). The elements have a surface opposite of the substrate and sides extending down to the substrate, A coating (51, 51a, 51b, 51c, 51 d. 51e) is disposed on the surface of the elements and continuing partially down both sides (52, 53) of the elements without coating the substrate exposed between the elements (23).