AL ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE AND SPUTTERING TARGET

摘要

Disclosed is an Al alloy film which can be in direct contact with a transparent pixel electrode in a wiring structure of a thin film transistor substrate that is used in a display device, and which has improved corrosion resistance against an amine remover liquid that is used during the production process of the thin film transistor.  Also disclosed is a display device using the Al alloy film.  Specifically disclosed is an Al alloy film for a display device, said Al alloy film being directly connected with a transparent conductive film on a substrate of a display device, and containing 0.05-2.0 atom% of Ge, at least one element selected from among element group X (Ni, Ag, Co, Zn and Cu), and 0.02-2 atom% of at least one element selected from among element group Q consisting of the rare earth elements.  A Ge-containing deposit and/or a Ge-concentrated part is present in the Al alloy film for a display device.  Also specifically disclosed is a display device comprising the Al alloy film.