CALIBRATION STANDARD MEMBER, METHOD FOR MANUFACTURING THE MEMBER, AND SCANNING ELECTRONIC MICROSCOPE USING THE MEMBER

摘要

Provided is a standard member for performing highly precisely a magnification calibration to be used in an electronic microscope.  A plane direction (110) or (100) silicon substrate containing a magnification calibration pattern composed of a periodic pattern of a constant pitch size and a plane direction (110) or (100) silicon substrate containing not the periodic pattern of the constant pitch size but an optical-axis adjusting pattern are joined by using no adhesive and by aligning the plane directions of the two substrates with each other.  Next, the joined substrates are cleaved or diced so that the (111) plane or (110) plane thereof may be sectional surfaces, and one of the periodic patterns of the individual patterns is selectively etched to form the standard member which has a corrugated periodic pattern of a constant pitch size on a section having no any step and any damage on a super lattice pattern and being perpendicular to the substrate surface.