发明名称 METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS
摘要 In one aspect, a method of improving the performance of an electronic device manufacturing facility is provided, including the step of reducing the number of electronic device manufacturing component seasoning steps which are performed using production equipment, whereby the amount of electronic device manufacturing system downtime is reduced. Several other aspects are provided.
申请公布号 KR20100051099(A) 申请公布日期 2010.05.14
申请号 KR20107005217 申请日期 2008.08.09
申请人 APPLIED MATERIALS, INC. 发明人 WANG JIANSHENG;TAN SAMANTHA
分类号 H01L21/00;H01L21/02 主分类号 H01L21/00
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