| 摘要 |
<p>Provided is a film thickness measuring apparatus by which accurate film thickness measurement values can be obtained even when the position of a film transfer member, which moves a film while supporting the film, varies. The film thickness measuring apparatus has a light irradiation section which irradiates the film with light, and a light receiving section which receives reflection light from the film, and the apparatus measures the thickness of the thin film based on output from the light receiving section. The film thickness measuring apparatus has a light irradiation/receiving section holding member which holds the light irradiation section and the light receiving section, and the film transfer member, which transfers the film that faces the light irradiation section and the light receiving section, while supporting the film. The relative positional relationship between the film surface to be measured and the light irradiation section and that between the film surface and the light receiving section are maintained by engaging the light irradiation/receiving section holding member with the film transfer member.</p> |
