EXHAUST CONDENSATE REMOVAL APPARATUS FOR ABATEMENT SYSTEM

摘要

Exhaust condensate removal apparatuses for abatement systems and methods of removing exhaust condensate from abatement systems are described. An exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust openly cross-exchanged with the cabinet exhaust. Another exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust closedly cross-exchanged with the cabinet exhaust.