| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time for correcting defects in a wide area of a coating film, and to achieve the uniformity of the thickness of the coating film regardless of the unevenness of a substrate surface. SOLUTION: In a defect correction method for correcting a defect 6 of an orientation film 3 formed on a color filter substrate 1 surface, a chemical liquid dropping step of dropping a proper amount of a correcting liquid 5 to the defect 6, and a stamp pressing step of spreading out the correcting liquid 5 by pressing the color filter substrate 1 surface with a stamp 8 elastically deformed according to the unevenness of the color filter substrate 1 surface are carried out. COPYRIGHT: (C)2010,JPO&INPIT |
