| 摘要 |
PROBLEM TO BE SOLVED: To perceive the height of a component on a board while suppressing costs of an image pickup device. SOLUTION: In a board inspection system, a mirror angle control part switches an image pickup angle so that a line sensor scans an image of a board 2 seen from image pickup angles having different absolute values of the angles with respect to a normal line of a surface to be inspected. The mirror angle control part switches the image pickup angle so that an optical path length from the line sensor to the board 2 is not varied. The mirror angle control part switches the image pickup angle by changing the angle of a semi-transparent mirror 42 reflecting the light from the board 2 to the line sensor so that the optical path length from the line sensor to the board 2 is not varied. The mirror angle control part switches a perpendicular image pickup angle perpendicular to the surface of the board 2 and an inclination image pickup angle inclined with respect to the surface of the board 2. COPYRIGHT: (C)2010,JPO&INPIT
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