| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared detecting element that easily achieves the infrared detecting element with high sensitivity, and to provide a sensor with the infrared detecting element and a method of manufacturing the infrared detecting element. Ž<P>SOLUTION: The infrared detecting element 1 includes: an Si substrate part 7 which has a notch 3; and a thermal insulation thin film part 5 which is thinner than the Si substrate part 7 and covers the notch 3. In the infrared detecting element 1, a plurality of thermoelectric elements 9 are arranged through an epitaxial silicon layer 15, and each of the thermoelectric elements 9 is electrically connected in series by a wiring part 11, so that the infrared detecting element 1 straddles the thermal insulation thin film part 5 and the Si substrate part 7 on an intermediate oxide film 8. Moreover, the thermoelectric elements 9 are formed from an electrothermal thin film 19 containing epitaxial strontium titanate formed on the epitaxial silicon layer 15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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