| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain an apparatus for testing a semiconductor, a prober and a device for rotating a head which enable prevention of incorrect line connection of a base unit and a probe card. Ž<P>SOLUTION: The apparatus for testing the semiconductor performs a test of DUT by connecting the base unit mounted on a test head to the probe card mounted on the prober. Herein a non-contact sensor which is provided in the base unit and detects an identification mark given to the probe card, and a determining part which determines the propriety of connection to the probe card, based on the result of detection of the non-contact sensor, are included. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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