CLAMPING APPARATUS INCLUDING MOVABLE GRIPPER AND A SEMICONDUCTOR DEVICE FABRICATION PROCESS USING THE SAME

摘要

A clamping apparatus capable of clamping various semiconductor substrates is provided. The clamping apparatus includes includes a main body, and a support plate partially coupled to the main body. The support plate is movable vertically. In addition, the clamping apparatus further includes a fixed gripper coupled and fixed onto the main body and a movable gripper disposed on the main body. The movable gripper is movable horizontally.