发明名称 GAS TREATMENT APPARATUS AND METHOD OF CLEANING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a gas treatment apparatus which enables to save a trouble that a mixer must be cleaned manually. <P>SOLUTION: The apparatus includes a treatment tank in which treat water is pooled, the mixer arranged at a position in which an end is dipped into the treat water inside the treatment tank, a first introduction pipe introducing a specific gas to the mixer, a second introduction pipe introducing a dry gas to the mixer, a third introduction pipe introducing cleaning water which removes a product material to the mixer, a first valve opening and closing the first introduction pipe, a second valve opening and closing the second introduction pipe, a third valve opening and closing the third introduction pipe, a means of lowering water level, and a control part in which the first valve is closed when a start signal of a cleaning movement is input, and at the same time, the water level of the treat water is lowered by the means of lowering water level to the water level in which the end of the mixer is not dipped or less, the opening of only the second valve for hours necessary for the drying of the product material introduces the dry gas to the mixer, the second valve is closed, and at the same time the third valve is opened to introduce the cleaning water to the mixer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010104936(A) 申请公布日期 2010.05.13
申请号 JP20080280839 申请日期 2008.10.31
申请人 ELPIDA MEMORY INC 发明人 SAWADA KENICHIRO
分类号 B01D53/46;B01D53/34 主分类号 B01D53/46
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