| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror surface cooling type dew point meter for measuring a dew point of a gas to be measured based on a condensing state on the mirror surface whose temperature is adjusted, capable of improving measurement accuracy of the dew point of the gas to be measured, and measuring the dew point of the gas to be measured in a short time. SOLUTION: This dew point meter includes: a measuring chamber 2 for circulating the gas to be measured inside by supplying/discharging the gas G to be measured; a mirror 3 stored and installed inside the measuring chamber, to be exposed to the circulating gas to be measured; a temperature adjusting means 4 for adjusting the temperature of the mirror; a temperature measuring means 5 for measuring the temperature of the mirror; a light source 9 for illuminating the mirror surface; an imaging camera 10 for imaging the mirror surface; an image analysis means 101 for determining a condensation/frost generation state on the mirror surface based on image information from the imaging camera; and a temperature control means 102 for controlling operation of the temperature adjusting means 4 in order to keep the mirror temperature constant based on a determination result by an image analysis part. COPYRIGHT: (C)2010,JPO&INPIT
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