| 摘要 |
A case for storing a processing tool for mounting a substrate is provided. By the storing case, shaking of a ring frame is suppressed by suppressing foreign materials generated due to contact of a supporting piece and the ring frame, and the number of components is decreased by simplifying the configuration of the container main body. The case comprises a container main body (10) opened at front and rear, and a pair of supporting pieces (20) formed to face the inner surface of the opposite sidewalls (14) of the container main body (10) and to support the ring frame (2) of a processing tool for mounting a semiconductor wafer. A plurality of pairs supporting pieces (20) are arranged in the vertical direction of the container main body (10) while spaced apart from each other, and an inserting groove (21) for inserting the ring frame is formed between the adjoining supporting pieces (20). A stopper interfering with the rear side portion of the ring frame (2) is provided at the rear portion of each supporting piece (20), and an inclining face is formed in the stopper. Since the inclining face buries the insertion groove (21) gradually, shaking of the ring frame in the vertical direction can be prevented and the ring frame can be protected against damage.
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