| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette for a substrate to assure stability of the substrates after being stored into the cassette, which has a structure for preventing the occurrence of damage of a film surface of the substrate stored due to contact with a shelf piece adjacent to the film surface side because of vibration and inclination of the substrate stored, even when the shelf piece of the cassette for substrate is formed longer in the internal direction of the cassette. SOLUTION: The cassette for substrate temporarily stores the substrates under the condition that the substrates are stacked keeping a constant interval by supporting two sides opposed with each other or three sides among the four sides of substrate. This cassette is provided with shelf pieces and pawl parts for controlling substrate position. The shelf pieces are orderly arranged at least at the internal side of a side plate with shelf piece provided to the cassette for substrate, while the pawl parts for controlling substrate position are orderly arranged toward the internal side of the cassette for substrate from a movable pawl part fitting pole brace independently provided in parallel to the side plate with shelf piece. COPYRIGHT: (C)2010,JPO&INPIT |
