发明名称 WIRE SAW DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a wire saw device whose productivity is improved. SOLUTION: The wire saw device includes a wire 3 having abrasive grains fixed, a feed reel for feeding the wire 3, guide rollers 9 made of a material having JIS-A hardness of 75 or higher and 85 or lower and having grooves for guiding the wire 3 fed from the feed reel, a plurality of main rollers 5 for driving the wire 3 from the guide rollers 9 and a take-up reel for taking up the wire 3 from the plurality of main rollers 5. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010105114(A) 申请公布日期 2010.05.13
申请号 JP20080278624 申请日期 2008.10.29
申请人 KYOCERA CORP 发明人 NISHIZAWA TAKAAKI;NISHIGUCHI KOSUKE
分类号 B24B27/06;H01L21/304 主分类号 B24B27/06
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