| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of effective sample-side signal data and reference-side signal data which are collected with respect to one wavelength, in order to improve a measured value in S/N. SOLUTION: In a measurement carried out along with a wavelength scan, light entering a detector 17 is shielded by closing a shutter 6 for a period during which a diffraction grating 3 is mechanically driven in order to vary the wavelength, and background signal data are collected for the period. When the vibration of the driven diffraction grating 3 is settled, and the shutter 6 is opened in a stable state of the wavelength, since a sample-side light beam Ls passing through a sample to be measured 13 and a reference-side light beam Lr passing through a reference sample 12 reach the detector 17 alternately along with rotations of a rotating sector mirror 8, the sample-side signal data and the reference-side signal data are collected alternately. Only the sample-side signal data and the reference-side signal data are collected in such the state that the samples 12, 13 are irradiated with appropriate light, thereby increasing the number of effective data and improving the measured value in S/N. COPYRIGHT: (C)2010,JPO&INPIT
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