APPARATUS AND METHOD FOR WET TREATMENT OF AN OBJECT AND FLUID DIFFUSION PLATE USED THEREIN

摘要

PURPOSE: An apparatus and a method for a wet treatment of an object and a fluid diffusion plate used therein are provided to improve the process efficiency and uniformity for preventing the re-adsorption by eliminating a dead zone within a process bath equally. CONSTITUTION: A plurality of through holes(311) passing through the top and bottom of a diffusing plate are formed on a diffusing plate(300). An internal space is limited by the top, bottom, and side of the diffusing plate. A fluid supplier supplies a processing liquid to the internal space. A plurality of fluid injection nozzles(312) penetrate top to be communicated with the internal space. In the diffusing plate, a gas supply line(320) is connected to a flow control valve to receive the gas from the outside.