| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a contact probe forming the contact probe having a plurality of curved parts by a simple method and with fewer manufacturing steps. SOLUTION: On a main surface of an insulating substrate 107, a first conducting domain 51 consisting of a first conducting film 5, a second conducting domain 61 consisting of a second conducting film 6 and an insulating domain 41 insulating these conducting domains are formed. By applying a voltage to the first conducting film 5 and electroplating a conducing material on the first conducting film 5, the first conducting film and the second conducting film are conductively connected, and a sacrifice layer 8 is formed which has a first curved surface 82a rising at the periphery part extending over the second conducting domain and curved toward the second conducting domain 61 and a second curved surface 82b rising in the second conducting domain 61 and curved toward the first conducting domain 51. The contact probe is formed on the sacrifice layer 8. COPYRIGHT: (C)2010,JPO&INPIT
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