发明名称 FUSE STRUCTURE FOR INTERGRATED CIRCUIT DEVICES
摘要 A fuse structure for an IC device and methods of fabricating the structure are provided. The fuse structure comprises a metal-containing conductive strip formed over a portion of a semiconductor substrate. A dielectric layer is formed over the semiconductor substrate, covering the conductive strip. A first interconnect and a second interconnect are formed in vias extending through the dielectric layer, each physically and electrically connecting to a part of the conductive layer. First and second wiring structures are formed over the dielectric layer in electrical contact with the first and second interconnects respectively. The contact area between one of the interconnects and the strip is chosen so that electromigration will occur when a pre-selected current is applied to the fuse structure.
申请公布号 US2010117190(A1) 申请公布日期 2010.05.13
申请号 US20080270717 申请日期 2008.11.13
申请人 CHUANG HARRY;THEI KONG-BENG;CHUNG SHENG-CHEN;LIANG MONG-SONG 发明人 CHUANG HARRY;THEI KONG-BENG;CHUNG SHENG-CHEN;LIANG MONG-SONG
分类号 H01L21/768;H01L23/525 主分类号 H01L21/768
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