| 摘要 |
PROBLEM TO BE SOLVED: To provide an isolator device enabling an operation to be easily performed from the outside of the operation chamber when the supply/exhaust filter of an internal device installed in the isolator device, assuring safe operation, and eliminating the need of complicated operations such as the washing of the inside of the operation chamber needed for each filter replacement operation. SOLUTION: Two casings of the supply/exhaust filter of the internal device are provided to the wall part of the operation chamber of the isolator device. Each casing comprises a cylindrical body opening to the outside and inside of the operation chamber and both cover bodies openably supported on both openings. A filter in the casing is detachably installed in the center tube part of the cylindrical body which is divided into an outer tube part, the center tube part, and an inner tube part in the tube axis direction. An outer air blow hole communicating with the outside of the operation chamber is formed in the peripheral wall part of the outer tube part, and an inner air blow hole communicating with the inside of the internal device is formed in the peripheral wall part of the inner tube part. COPYRIGHT: (C)2010,JPO&INPIT |
