MATERIAL GAS CONCENTRATION CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of keeping the concentration of a material gas in a mixed gas constant even if the partial pressure of the material gas varies and having favorable responsiveness. SOLUTION: The material gas concentration control system is used for a material gasifying system 1 including a tank 13 for housing a material L, a lead-in pipe 11 for leading a carrier gas for gasifying the housed material L into the tank 13, and a lead-out pipe 12 for leading a mixed gas of the gasified material gas and the carrier gas from the tank 13. The control system includes a first valve 23 provided on the lead-out pipe 12, a concentration measurement section CS for measuring the concentration of the material gas in the mixed gas, and a concentration control section CC for controlling the opening degree of the first valve 23 so that the measurement concentration of the material gas measured by the concentration measurement section CS may become a set concentration which is previously set. COPYRIGHT: (C)2010,JPO&INPIT