| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a data measuring method and a device of a tomograph, reducing an electron beam irradiation quantity to a sample, in the data measuring method and the device of the tomograph in a transmission type electron microscope. Ž<P>SOLUTION: The data measuring device includes: a dislocation quantity calculating means 6 for obtaining a dislocation quantity from an image of a just before step with every inclining step when correcting visual field dislocation caused by inclining the sample 3a when measuring tomography data by the transmission type electron microscope; and a positional dislocation correcting means 6 for correcting positional dislocation by predicting the dislocation quantity in the next inclining step based on the dislocation quantity determined by the dislocation quantity calculating means 6, wherein the data measuring device is constituted to automatically measure the data. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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