发明名称 |
METHOD AND SYSTEM FOR MEASURING PATTERNED STRUCTURES |
摘要 |
A method of preparation of reference data for measuring the profile of a patterned structure for use in control of a manufacturing process, the method including: providing a model for generating profiles based on the manufacturing process; generating the profiles by simulation of the manufacturing process; and preparing diffraction signal reference data corresponding to the generated profiles.
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申请公布号 |
US2010121627(A1) |
申请公布日期 |
2010.05.13 |
申请号 |
US20090624555 |
申请日期 |
2009.11.24 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD. OF WEIZMANN SCIENTIFIC PARK |
发明人 |
FINAROV MOSHE;BRILL BOAZ |
分类号 |
G06G7/48;G01N21/47;G01N21/55;G03F1/00;G03F7/20;G06F17/10 |
主分类号 |
G06G7/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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