| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern drawing method by which a pattern including a linear portion and a branch branched therefrom can be formed and a transfer pattern in a desired figure can be left. <P>SOLUTION: Optical axis adjustment is performed so that beam spots of a first laser beam and a second laser beam are arranged adjoining to each other in a first direction on the surface of a workpiece. A pattern having a branch protruding from a linear trajectory is drawn by moving the workpiece such that the incident positions of the first laser beam and the second laser beam move from a start point to a finish point in a second direction intersecting the first direction, and simultaneously by continuously incoming the first laser beam from the start point to the finish point and by intermittently incoming the second laser beam. <P>COPYRIGHT: (C)2010,JPO&INPIT |
