| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect failure with improved precision even if ambient temperature changes or disturbance vibration is applied. <P>SOLUTION: An angular velocity sensor includes: an oscillator supported on a substrate so that the oscillator can be displaced resiliently; a drive means for vibrating the oscillator in the direction of a drive axis horizontal to the substrate surface; a detection axis direction displacement detection means for detecting the displacement of the oscillator in the direction of the detection axis horizontal to the substrate surface and vertical to the direction of the drive axis; and an angular velocity detection means for detecting angular velocity, based on the displacement in the direction of the detection axis of the oscillator. The angular velocity sensor also includes: a self-oscillation detection means for detecting the self-oscillation of the oscillator caused by the leakage of the vibration of the oscillator in the direction of the drive axis toward the detection axis; a self-oscillation feedback circuit for setting the self-oscillation of the oscillator to zero; and a failure determination means for determining failure by utilizing the output of the self-oscillation detection means. <P>COPYRIGHT: (C)2010,JPO&INPIT |
