| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a display device for effectively preventing the corrosion of the Al alloy film, in a manufacturing process of the display device having a structure in which an Al alloy film for a reflection electrode is directly connected onto an oxide transparent conductive film, when the film is exposed to an alkaline developer such as a TMAH (tetramethylammonium hydroxide) liquid solution. <P>SOLUTION: The method for manufacturing the display device having the structure in which the Al alloy film for a reflection electrode is directly connected onto the oxide transparent conductive film includes: a first process in which the oxide transparent conductive film is formed on a substrate; a second process in which the oxide transparent conductive film is heated at 150°C or higher at least for five minutes to crystalize it; and a third process in which the Al alloy film is formed on the oxide transparent conductive film. The Al alloy film includes an Al alloy which contains Ni of 0.1-4 atom%. <P>COPYRIGHT: (C)2010,JPO&INPIT |
