| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow rate sensor capable of suppressing increase of the physical size, and suppressing decline of flow rate detection reliability. <P>SOLUTION: In this thermal flow rate sensor including on one surface, a sensor chip on which a flow rate detection part for detecting a flow rate of fluid to be detected is formed, a circuit chip on which a control circuit for controlling input/output of the flow rate detection part is formed, and a loading member comprising a resin for loading the circuit chip thereon, the sensor chip is arranged on the circuit chip so that the whole rear surface of one surface of the sensor chip is faced to one surface of the circuit chip, and the sensor chip is connected mechanically to one surface of the circuit chip by using a part of the rear surface of the sensor chip as a connection portion. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
