摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technique for forming a field emission device for a field emission display system that uses a low-cost, large-sized substrate by a process that enables improvement in the productivity. <P>SOLUTION: The field emission device includes a cathode electrode formed on an insulating surface of the substrate, and a convex electron emission section formed on the surface of the cathode electrode, and the cathode electrode and the electron emitting section are formed with identical crystal semiconductor film, and the electron emission section has a conical shape or a whisker shape. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |