LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that can emit a line beam with a length in excess of 1 m longitudinally and with uniform irradiation intensity and that can perform efficient patterning.

SOLUTION: The apparatus includes: a laser outputting means 101 having a laser light source to output a plurality of laser beams; optical systems 103, 104 that shape each of the plurality of laser beams into a long beam which is long and longitudinally divergent light; a plurality of mask slits 109 that transmit the long beam in a prescribed shape by masking; and a mask slit moving means that moves the mask slits 109 in a two-dimensional direction parallel to the upper face of a workpiece 111 which is irradiated with the laser beam.

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