APPARATUS AND METHOD FOR MEASURING DEW SHAPE AND DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To precisely measure the shape and distribution of dew with dew condensation generated on a sample. SOLUTION: An apparatus 10 for measuring includes: a sample base 16; a probe 18; an excitation part 20 oscillating a tip portion of the probe 18; a determination part determining contact or proximity of the tip portion of the probe 18 with or to dew or a sample W according to the oscillation of the tip portion of the probe 18; a displacement mechanism 22 changing a relative position of the probe 18 to the sample base 16; a relative displacement derivation part measuring a relative displacement of the probe 18 to the sample base 16; a cooling mechanism 48 cooling the surface of the sample to be a dew point or lower; and a measurement portion measuring the shape and distribution of dew generated on the surface of the sample cooled by the cooling mechanism 48 based on the presence/absence of the contact or proximity by the determination part and the relative displacement derived by the relative displacement derivation part. COPYRIGHT: (C)2010,JPO&INPIT