| 摘要 |
PROBLEM TO BE SOLVED: To provide a formed article with a hard multilayer film, which includes an intermediate layer excellent in adhesion with a base material and a DLC layer being a surface layer having excellent wear resistance, does not cause exfoliation between the lowermost part of the DLC layer and the intermediate layer, and is also excellent in wear resistance, and to provide a method for producing the same. SOLUTION: The formed article 1 with a hard multilayer film is obtained by forming the multilayer film on the surface of a base material formed of a cemented carbide material or an iron-based material. The multilayer film includes (1) a film which is formed as a surface layer 5 of the multilayers and composed mainly of DLC deposited by using only graphite of a solid target as a carbon supply source to suppress mixing of hydrogen, (2) an intermediate layer 3 which is formed between the surface layer 5 and the base material 2 and composed mainly of at least chromium or tungsten, and (3) a stress relaxing layer 4 which is formed between the intermediate layer 3 and the surface layer 5 and composed mainly of carbon. The stress relaxing layer 4 is a graded layer in which the hardness is continuously or stepwisely increased from the intermediate 3 side to the surface layer 5 side. COPYRIGHT: (C)2010,JPO&INPIT |
