| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a glass substrate for a magnetic disk using a polishing liquid, which reliably removes contamination adhered to the glass substrate in a polishing step even in a condition of using a comparatively dilute chemical solution in a cleaning step after the polishing step in order to improve surface roughness, and which suppresses an increase in pH due to repetition of the polishing steps even when pH of the polishing liquid is set in a weakly acidic region in order to achieve low roughness. SOLUTION: In the method for manufacturing the glass substrate for the magnetic disk by polishing a main surface of the glass substrate, the polishing liquid to be used in the polishing step includes two or more components containing a substance exhibiting a chelating action to the contamination adhering to the glass substrate and a substance exhibiting a dispersing action thereto, and the substances are also included in a cleaning liquid used in a cleaning step achieved after the polishing step. The polishing liquid includes an acidic substance to adjust pH to a predetermined value, and a buffer component composed of an acidic weak acid and an alkaline weak acid salt, and is a buffer solution at the predetermined pH. COPYRIGHT: (C)2010,JPO&INPIT |
