| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell capable of stabilizing generation performance of the solar cell and improving a yield in manufacturing the same. <P>SOLUTION: A method of manufacturing a solar cell comprising the steps of: a gas discharge process S2, in which the internal gas of a container is discharged to increase the degree of vacuum while being closed after being subjected to air opening for maintenance; a film formation process S4, in which the inside of the discharged container is filled with a gas mixture that mixes an inert gas with a mixing gas containing oxygen atoms at a predetermined concentration, and a voltage is applied between a target arranged in the container and a substrate to manufacture a film constituting a solar cell on the substrate; and an initial film formation process S3, in which, prior to the deposition process S4, the gas mixture whose incoming gas concentration in the gas mixture is made to be lower than a predetermined concentration is supplied into the container and a film is formed only for a predetermined period on the substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
