| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of an apparatus, by reducing a radial dimension of a heat treatment chamber, to perform uniform heat treatment on a treating object by securing a smooth flow of a gas in the heat treatment chamber, to dispense with a fan of high performance by reducing the pressure loss of the gas for performing heat treatment on the treating object, and to reduce the apparatus cost and operation cost. SOLUTION: In this heat treatment apparatus having a door for carrying in and out the treating object to the heat treatment chamber or performing inspection, the door is provided with the fan for cooling the treating object; a heat exchanger 12 exchanging heat between the gas flow formed by the fan and a refrigerant guided into the heat treatment chamber from the external of the heat treatment chamber; and a gas diffusing section 16 disposed on a gas inflow surface of the heat exchanger 12 and distributing the gas to the heat exchanger 12 in a state of the gas being diffused. COPYRIGHT: (C)2010,JPO&INPIT
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