| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for inexpensively purifying nitrogen trifluoride containing halogen gas or halogen compounds as impurity in the gas. Ž<P>SOLUTION: The method for purifying nitrogen trifluoride containing halogen or halogen compounds as impurity includes the steps of sequentially bringing the nitrogen trifluoride into contact with water, a basic aqueous solution and an aqueous solution of a reducing agent. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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