发明名称 |
METHOD FOR MAKING MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE |
摘要 |
The present invention discloses a method for making a MEMS device, comprising: providing a zero-layer substrate; forming a MEMS device region on the substrate, wherein the MEMS device region is provided with a first sacrificial region to separate a suspension structure of the MEMS device from another part of the MEMS device; removing the first sacrificial region by etching; and micromachining the zero-layer substrate.
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申请公布号 |
US2010120257(A1) |
申请公布日期 |
2010.05.13 |
申请号 |
US20080270804 |
申请日期 |
2008.11.13 |
申请人 |
PIXART IMAGING INCORPORATION |
发明人 |
WANG CHUAN WEI;LEE SHENG TA |
分类号 |
H01L21/306 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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