| 摘要 |
PURPOSE: A vacuum deposition device with a temperature controller for solid powder and a method using the same are provided to use compressed air as transferred gas without using inert gas, and to eliminate noise. CONSTITUTION: A vacuum deposition device for solid powder is composed of an air supply unit, an air pressing unit, an air processing unit, a solid powder supply unit, a vacuum deposition chamber(26), an adiabatic carrier(22), a transfer gas heating temperature controller(102), a spraying nozzle(25), and a system controller(H). Solid powder is deposited in a base material. The base material is located inside the vacuum deposition chamber. The adiabatic carrier transfers an aerosol to the vacuum deposition chamber. The transfer gas heating temperature controller pre-heats transferred air, and controls the temperature of the air.
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