| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a control device for controlling an alignment apparatus that aligns substrates and reduces the scale of the alignment apparatus. <P>SOLUTION: The control device for controlling an alignment apparatus includes: an imaging unit 42 for imaging a plurality of images, imaging each of a plurality of regions of a surface of a substrate by using a camera; a region detecting unit 45 for selecting detection regions from among a plurality of regions, based on the plurality of images; and an alignment unit 47 for aligning a substrate, based on the alignment images imaged by the camera and imaging marks formed in the detecting regions. Thus, since the control device 11 for controlling an alignment apparatus does not require specific functions for arranging the marks used for aligning to a field of view of the camera, the alignment apparatus can be reduced in its scale and be more readily manufactured, and can easily detect the regions where the alignment marks exist. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
