| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction cup for sucking a target sample with relatively large suction force and reducing the damage to the target sample to be sucked. SOLUTION: The suction cup includes: a support comprising a compact body having an exhaust hole; a suction layer supported by the support and made of a porous body; and an amorphous Si film deposited on the surface of the suction layer. COPYRIGHT: (C)2010,JPO&INPIT |
