| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of forming a coated film having a sufficiently uniform thickness by uniformizing the supply of coating material, and to provide a method of manufacturing functional support using the coating apparatus. SOLUTION: In the coating apparatus, a coating material tank and a die coater are connected with piping, the coating material stored in the coating material tank is supplied to the die coater by a pump disposed in the middle of the piping and thereby, the coating material is discharged to the support from the die coater, and the coating film is formed on the surface of the support, wherein a branch is disposed in the piping between the pump and the die coater and an air chamber having a prescribed volume or more is disposed on the branched end. COPYRIGHT: (C)2010,JPO&INPIT
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