PROBE ARRAY AND METHOD OF MANUFACTURING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To provide an inexpensive and efficient method of manufacturing a high density probe array. Ž<P>SOLUTION: The method of forming the probe array includes forming a layer of tip material 101 over a block of probe material 102. A first electron discharge machine (EDM) electrode 201 is arranged over the layer of tip material 101, and the EDM electrode 201 has a plurality of openings corresponding to a plurality of probes to be formed. Excess material is removed from the layer of tip material 101 and the block of probe material 102 to form the plurality of probes. A substrate having a plurality of through holes corresponding to the plurality of probes is arranged so that the plurality of probes penetrate the plurality of through holes. The substrate is bonded to the plurality of probes. Excess probe material 102 is removed so as to planarize the substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž